Profiling Approaches Beyond FIB

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This presentation delves into advanced profiling methods for analyzing internal device structures critical to DRAM and NAND functionality. It reviews core techniques, including TEM and SEM, their limitations, and introduces Focused Ion Beam (FIB) and Broad Ion Beam (BIB) as alternative solutions. FIB enables detailed Z-profile imaging ideal for process development but is costly and slow; BIB offers a cost-effective and efficient option for wide, shallow cross-sections. The session emphasizes...